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  Lam Research 853-540066-005

Lam Research 853-540066-005 853-540066-005 Rev.f Industrial End-point Detector Module
Brand : Lam Research
Part Number : 853-540066-005
Description: 853-540066-005 Rev.f Industrial End-point Detector Module
Condition : Refurbished
Inventory Count : 1  in stock
Price :
Need Help? To replace or repair your 853-540066-005 contact us today: [email protected] or call Ryan Fitzgerald at (212) 772-6992 ext. 704

Lam Research 853-540066-005 In Stock

We have available in stock qty 1 of the 853-540066-005 original equipment by Lam Research, in stock for delivery to your location. This original Lam Research OEM spare is refurbished and in excellent working condition. We may have additional and new units in stock as well. To receive an online quote or obtain additional information simply click here. Qualified York technicians are standing by to assist you.


Support for your Lam Research 853-540066-005

Have a defective unit in need of service or repair? In addition to stocking the Lam Research 853-540066-005 spares, we also provide Lam Research services on the 853-540066-005 and related equipment. We offer Extended Warranty plans for your Lam Research 853-540066-005 as well as Maintenance and Support contracts. For a Lam Research warranty or support plan to fit your requirements, send an email to [email protected] or call Ryan Fitzgerald at (212) 772-6992 ext. 704


Repair + Rebuild Services for your Lam Research equipment

We service and repair Lam Research 853-540066-005 and related systems and components, including severely damaged and defective units. Our services for the Lam Research 853-540066-005 include diagnostic evaluation, troubleshooting, component and board level repair, as well as complete rebuilding of the 853-540066-005 if necessary. Expedited handling of our evaluations and repairs are included as a standard service for all our clients. All our 853-540066-005 repairs include a 1 year warranty, covering both parts and labor.

To receive a quote to repair your defective Lam Research unit(s) simply complete this online form, email [email protected] or call Ryan Fitzgerald at (212) 772-6992 ext. 704


Assistance needed with related items Lam Research 853-540066-005?
Some of the related motion controls products we support:
Leeson 116129 Leeson 110961
Leeson 109073 Leeson 113582
Leeson 102548 Leeson 117888
Leeson 1308 Leeson 20161
Leeson 101052 Lebow 1606


We stock a large inventory of Lam Research industrial automation systems and parts.
We repair, service and calibrate most Lam Research models of equipment.
We ship Lam Research replacement parts worldwide, with expedited shipping for your urgent Lam Research requirements


For immediate assistance click here for quick online help
or contact our Automation & Controls team:

Mr. Ryan Fitzgerald
Director, Industrial Automation & Controls Service Team
[email protected]
(212) 772-6992 ext. 704


Our staff at York Scientific is dedicated to help you succeed with all your mission-critical Lam Research Industrial Automation equipment needs.

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York Controls features all makes and models of industrial automation systems & parts.

York Controls repairs, services and calibrates every brand and model of equipment.

York Controls ships worldwide, with expedited shipping available for all your urgent requirements.

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